• Compound vacuum pump that combines a tubromolecular pump and a drag pump on a single shaft
• The turbomolecular ump is made from a multi-stage axial-flow turbine which is optimized for operation in molecular flow conditions
• Designed for operation at higher pressures than conventional turbomolecular pumps
• Vent gas: dry air, nitrogen, argon or other inert gases
• Recommended purge gas flow: 25 SCCM (0.42 mbar s-1)
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